Thin-film PMUTs have been important research topics among microultrasound experts, and a concise review on their research progress is reported herein. Through rigorous surveying, scrutinization, and perception, it has been determined that the work in this field began nearly 44 years ago with the primitive development of functional piezoelectric thin-film materials. To date, there are three major companies commercializing thin-film PMUTs on a bulk scale. This commercialization illustrates the extensive contributions made by more than 70 different centers, research institutes, and agencies across 4 different continents regarding the vast development of these devices’ design, manufacturing, and function. This review covers these important contributions in a short yet comprehensive manner; in particular, this paper educates readers about the global PMUT outlook, their governing design principles, their manufacturing methods, nonconventional yet useful PMUT designs, and category-wise applications. Crucial comparison charts of thin-film piezoelectric material used in PMUTs, and their categorically targeted applications are depicted and discussed to enlighten any MEMS designer who plans to work with PMUTs. Moreover, each relevant section features clear future predictions based on the author’s past knowledge and expertise in this field of research and on the findings of a careful literature survey. In short, this review is a one-stop time-efficient guide for anyone interested in learning about these small devices.

Kaustav Roy

Joshua En-Yuan Lee

Chengkuo Lee

Microsystems &amp; Nanoengineering

MICROSYSTEMS & NANOENGINEERING 发表有关微纳机电系统 (MEMS/NEMS) 和与 MEMS/NEMS 相关的纳米工程最新方面的原创研究文章和评论。该杂志将涵盖微米和纳米尺度的设备和系统的新设计（理论、建模和模拟）、制造、表征、可靠性和应用。纳米工程 MEMS/NEMS 也将在本期刊的出版范围内。

The journal "Microsystems and Nanoengineering" publishes original research articles and reviews on the latest aspects of micro-electromechanical systems (MEMS/NEMS) and related nanoengineering. It covers new designs (theory, modeling, and simulation), manufacturing, characterization, reliability, and applications of devices and systems at the micro and nano scales. Research in nanoengineering related to MEMS/NEMS is also included within the scope of this journal.

《Microsystems and Nanoengineering》期刊发表关于微纳机电系统（MEMS/NEMS）及相关纳米工程领域的原创研究文章和评论。该期刊涵盖微米和纳米尺度设备和系统的新设计（包括理论、建模和模拟）、制造、表征、可靠性和应用等方面。纳米工程在MEMS/NEMS领域的研究也在本期刊的出版范围之内。

Category	Quartile
工程技术	1
工程技术, 仪器仪表	1
工程技术, 纳米科技	2

Thin-film PMUTs: a review of over 40 years of research

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Journal Info

Category	Quartile
NANOSCIENCE & NANOTECHNOLOGY	1