A low-noise readout integrated circuit (ROIC) for a microelectromechanical systems (MEMS) microphone is presented in this paper. A positive feedback signal amplification technique is applied at the front-end of the ROIC to minimize the effect of the output buffer noise. A feedback scheme in the source follower prevents degradation of the noise performance caused by both the noise of the input reference current and the noise of the power supply. A voltage booster adopts noise filters to cut out the noise of the sensor bias voltage. The prototype ROIC achieves an input referred noise (A-weighted) of −114.2 dBV over an audio bandwidth of 20 Hz to 20 kHz with a 136 μA current consumption. The chip is occupied with an active area of 0.35 mm2 and a chip area of 0.54 mm2.

Yi-Gyeong Kim

Min-Hyung Cho

Jaewoo Lee

Young-Deuk Jeon

Tae Moon Roh

Chun-Gi Lyuh

Woo Seok Yang

Jong-Kee Kwon

ETRI Journal

ETRI JOURNAL 是一份国际同行评审的多学科期刊，双月刊以英文出版。该杂志的主要重点是提供一个开放的论坛，以交流信息、电信和电子领域的创新思想和技术。感兴趣的关键主题包括高性能计算、大数据分析、云计算、多媒体技术、通信网络和服务、无线通信和移动计算、材料和组件技术以及安全性。ETRI 杂志拥有国际编辑委员会和来自世界各地的专家作为审稿人，发表关于来自世界各地的最新和最佳发展的高质量研究论文全球社区。

ETRI JOURNAL is an international peer-reviewed multidisciplinary journal published bi-monthly in English. The journal primarily aims to provide an open forum for the exchange of innovative ideas and technologies in the fields of information, telecommunications, and electronics. Key topics of interest include high-performance computing, big data analytics, cloud computing, multimedia technologies, communication networks and services, wireless communication and mobile computing, materials and components technology, and security. ETRI JOURNAL has an international editorial board and expert reviewers from around the world, publishing high-quality research papers on the latest and best developments globally, serving the international academic community.

ETRI JOURNAL 是一本国际同行评审的多学科期刊，双月刊以英文出版。该期刊主要致力于提供一个开放的论坛，以交流信息、电信和电子领域的创新思想和技术。感兴趣的关键主题包括高性能计算、大数据分析、云计算、多媒体技术、通信网络与服务、无线通信与移动计算、材料与组件技术以及安全性。ETRI JOURNAL 拥有国际编辑委员会和来自世界各地的专家作为审稿人，发表关于全球最新和最佳发展的高质量研究论文，服务于全球学术社区。

Category	Quartile
计算机科学	4
计算机科学, 工程电子与电气	4
计算机科学, 电信学	4

Low-Noise MEMS Microphone Readout Integrated Circuit Using Positive Feedback Signal Amplification

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