Abstract According to simulation results from FDTD, Fano resonance of the air-Si-Si-air combined waveguide cavity was mainly studied, including the distribution of the magnetic field, quality factor, extinction coefficient and transmission efficiency. Fano resonance was related to the height of Si. When the height H 2 = 140 nm of Si and the height of H 1 = 300 nm, there was higher extinction coefficient in the resonant cavity and the better quality of the resonator, whose transmission efficiency of surface plasma was up to 89% for 1110 nm. This combined cavity had very good filtering effect.

Shu Li

Shuguang Chen

Shifang Xiao

Xiang Zhai

Huangqing Liu

Jingjing Mao

Jianzhong Mao

Plasma Research Express

Fano resonance of air-Si waveguide cavity

空气-硅波导腔的Fano共振

Fano resonance of air-Si waveguide cavity

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