In-depth modifications of implanted amorphous carbon films
F. L. Freire, C. A. Achete, D. F. Franceschini, G. Mariotto
DOI: 10.1007/bf00331929
Journal: Applied Physics A Solids and Surface
ivySCI AI Smartly Parses PDF, Answers Researchers' Questions, and Helps You Understand Papers in Seconds
Journal Info
Journals:
ISSN 0721-7250