Abstract In this paper, flexible substrate integrated waveguide (SIW) resonators have been designed and fabricated on polyimide substrates for humidity sensing applications. The proposed SIW resonant cavity allows the resonator to obtain the maximum humidity sensitivity and meet the demand for flexible microwave sensing detection. Meanwhile, the humidity response performance can be further significantly enhanced by introducing nanodiamond (ND) sensing material. Three prototypes of ND-coated SIW sensors with different bending radii are measured to analyze their humidity sensing performance. The experimental results demonstrate that the proposed ND-coated SIW sensor with the minimum bending radius can achieve a maximum humidity sensitivity of 1.09 MHz/% relative humidity (RH) in the high RH region (&gt;75.3% RH) and a low humidity hysteresis of 1.8% in the range of 11.3–97.3% RH. This study provides a promising candidate to realize flexible microwave sensors with excellent sensing performance.

Chang-ming Chen

Lu Chen

Yao Yao

Ye Peng

International Journal of Microwave and Wireless Technologies

INTERNATIONAL JOURNAL OF MICROWAVE AND WIRELESS TECHNOLOGIES 的主要目标是加强全世界微波工程师之间的交流。因此，它是跨学科和面向应用的，为微波行业提供了一个平台。涵盖范围包括：应用电磁场理论（天线、传输线和波导）、组件（无源结构和半导体器件技术）、模拟和混合信号电路、系统、光-微波相互作用、电磁兼容性、工业应用、生物效应和医学应用程序。

The primary goal of the International Journal of Microwave and Wireless Technologies is to enhance communication among microwave engineers worldwide. This interdisciplinary and application-oriented journal provides a significant platform for the microwave industry. The scope includes: applied electromagnetic field theory (such as antennas, transmission lines, and waveguides), components (passive structures and semiconductor device technologies), analog and mixed-signal circuits, systems, optical-microwave interactions, electromagnetic compatibility, industrial applications, biological effects, and medical applications.

《International Journal of Microwave and Wireless Technologies》的主要目标是促进全球微波工程师之间的交流。该期刊跨学科且注重应用，为微波行业提供了一个重要的平台。其涵盖的领域包括：应用电磁场理论（如天线、传输线和波导）、组件（无源结构和半导体器件技术）、模拟与混合信号电路、系统、光-微波相互作用、电磁兼容性、工业应用、生物效应及医学应用等。

Category	Quartile
计算机科学	4
计算机科学, 工程电子与电气	4
计算机科学, 电信学	4

Flexible SIW humidity sensors based on nanodiamond sensing films

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