Advanced Optical Technologies

Abstract Contemporary white light-emitting diodes (LEDs) are much more efficient than compact fluorescent lamps and hence are rapidly capturing the market for general illumination. LEDs are also replacing halogen lamps or even newer xenon based lamps in automotive headlamps. Because laser diodes are inherently much brighter and often more efficient than corresponding LEDs, there is great research interest in developing laser diode based illumination systems. Operating at higher current densities and with smaller form factors, laser diodes may outperform LEDs in the future. This article reviews the possibilities and challenges in the integration of visible laser diodes in future illumination systems.

Chandrajit Basu

Merve Meinhardt-Wollweber

Bernhard Roth

Lighting with laser diodes

激光二极管照明

Abstract Extreme ultraviolet (EUV) lithography is expected to succeed in 193-nm immersion multi-patterning technology for sub-10-nm critical layer patterning. In order to be successful, EUV lithography has to demonstrate that it can satisfy the industry requirements in the following critical areas: power, dose stability, etendue, spectral content, and lifetime. Currently, development of second-generation laser-produced plasma (LPP) light sources for the ASML’s NXE:3300B EUV scanner is complete, and first units are installed and operational at chipmaker customers. We describe different aspects and performance characteristics of the sources, dose stability results, power scaling, and availability data for EUV sources and also report new development results.

Igor Fomenkov

David Brandt

Alex Ershov

Alexander Schafgans

Yezheng Tao

Georgiy Vaschenko

Slava Rokitski

Michael Kats

Michael Vargas

Michael Purvis

Rob Rafac

Bruno La Fontaine

Silvia De Dea

Andrew LaForge

Jayson Stewart

Steven Chang

Matthew Graham

Daniel Riggs

Ted Taylor

Mathew Abraham

Daniel Brown

Light sources for high-volume manufacturing EUV lithography: technology, performance, and power scaling

高产量制造EUV光刻光源：技术、性能与功率扩展

The creation of holes in hard-brittle materials is highly relevant for various applications. The often-necessary high aspect ratios of the drill holes pose a particular challenge, with drill diameters of a few millimeters and drill lengths of up to several hundred millimeters. This requires the application of suitable tools with a high aspect ratio and sufficient stability. In particular the drilling process itself must be thoroughly understood and optimized in order to produce deep holes without component and tool defects while maintaining the required dimensional and positional accuracy. This paper presents investigations on the influence of an ultrasonic tool oscillation for drilling high aspect ratio holes. Two kinematic approaches, deep drilling and helical drilling, are examined with focus on the achievable dimensional accuracy of the holes and the roughness of the inner walls of the bore. It is found, that adding a longitudinal high frequency tool oscillation enables a considerable reduction in dimensional deviations of 91% for helical drilling.

Sebastian Henkel

Marcel Binder

Monique Knauf

Jens Bliedtner

Edda Rädlein

Influence of ultrasonic tool oscillation during drilling of fused silica

钻削熔融石英过程中超声工具振动的影响

Introduction/Purpose Laser-excited remote phosphor (LERP) light sources have gained significant importance in lighting and display applications due to their unique brightness and color-rendering qualities. In addition to their well-known advantages in these areas, we found that they also offer largely unexplored potential for sensor applications, such as quantitative fluorescence analysis. This potential is especially relevant when sophisticated optics operating under space and cost constraints require low-etendue sources with highly stable spectral properties. In this paper, we present an example of such an application. The purpose of our research is to assess currently available phosphor materials and design a light source to our particular reference application. Methods For this purpose, a characterization setup was developed that compares different phosphors excited by small laser spots, with diameters between 100 μm and 280 μm, in terms of emitted spectral radiance, incident laser power, and irradiance. Results The investigation identified two suitable phosphors, including a phosphor that addresses the gap in the blue and green wavelength ranges. Furthermore, the importance of small laser spots was demonstrated, which allows reducing the laser power to simplify light source design and reduce costs. Discussion/Conclusion This research proposes a functional set of phosphors for the abovementioned application and, at the same time, presents the current limitations of LERP light sources. We remain confident in the described application field for LERP sources and hope that the needs elaborated in this work will inspire further research and development of novel phosphor materials.

Jan Müller

Ingo B. Ramsteiner

Reinhold Fieß

Cornelius Neumann

High-radiance phosphor-converted light sources for fluorescence analysis

高亮度荧光粉转换光源用于荧光分析

This paper aims to present data recorded by a three-axial Fiber-Optic Rotational Seismograph (FORS). The laboratory and field tests showed a high correlation coefficient above 99% between two seismographs signals during the external disturbance, with an amplitude ranging from 0.5 mrad/s to 1.2 rad/s. This is achieved by ensuring a 100 ns time synchronization in the systems. At the same time, the Allan Variance analysis was applied to determine the basic parameters of random errors of the presented seismographs. The performed analysis indicates the angular random walk of 35–45 nrad/s/√Hz and a bias instability below 50 nrad/s. FORS offers the widest dynamic range available, at 170 dB, which is crucial during rotational seismology exploration due to its wide range of interest from seismology to engineering applications. Finally, a field research is also presented during an explosion in a closed limestone quarry in the border area.

Anna T. Kurzych

Leszek R. Jaroszewicz

Michał Dudek

Rotational motion investigation in seismology – remote sensing by an optical fiber seismograph

地震学中的旋转运动研究——光纤地震仪的遥感技术

Nowadays, as the ever-increasing demand for more powerful computing resources continues, alternative advanced computing paradigms are under extensive investigation. Significant effort has been made to deviate from conventional Von Neumann architectures. In-memory computing has emerged in the field of electronics as a possible solution to the infamous bottleneck between memory and computing processors, which reduces the effective throughput of data. In photonics, novel schemes attempt to collocate the computing processor and memory in a single device. Photonics offers the flexibility of multiplexing streams of data not only spatially and in time, but also in frequency or, equivalently, in wavelength, which makes it highly suitable for parallel computing. Here, we numerically show the use of time and wavelength division multiplexing (WDM) to solve four independent tasks at the same time in a single photonic chip, serving as a proof of concept for our proposal. The system is a time-delay reservoir computing (TDRC) based on a microring resonator (MRR). The addressed tasks cover different applications: Time-series prediction, waveform signal classification, wireless channel equalization, and radar signal prediction. The system is also tested for simultaneous computing of up to 10 instances of the same task, exhibiting excellent performance. The footprint of the system is reduced by using time-division multiplexing of the nodes that act as the neurons of the studied neural network scheme. WDM is used for the parallelization of wavelength channels, each addressing a single task. By adjusting the input power and frequency of each optical channel, we can achieve levels of performance for each of the tasks that are comparable to those quoted in state-of-the-art reports focusing on single-task operation...

Bernard J. Giron Castro

Christophe Peucheret

Darko Zibar

Francesco Da Ros

Multi-task photonic reservoir computing: wavelength division multiplexing for parallel computing with a silicon microring resonator

多任务光子储备计算：利用硅微环谐振器进行波分复用实现并行计算

X-ray ptychography is a coherent diffraction imaging technique that allows for the quantitative retrieval of both the amplitude and phase information of a sample in diffraction-limited resolution. However, traditional reconstruction algorithms require a large number of iterations to obtain phase and amplitude images exactly, and the expensive computation precludes real-time imaging. To solve the inverse problem of ptychography data, PtychoNN uses deep convolutional neural networks for real-time imaging. However, its model is relatively simple, and its accuracy is limited by the size of the training dataset, resulting in lower robustness. To address this problem, a series of W-Net neural network models have been proposed which can robustly reconstruct the object phase information from the raw data. Numerical experiments demonstrate that our neural network exhibits better robustness, superior reconstruction capabilities and shorter training time with high-precision ptychography imaging.

Abbreviation	Adv. Opt. Technol.
Journal Impact	2.16
Quartiles(Global)	OPTICS(Q2)

ISSN	2192-8576, 2192-8584
h-index	28

Publication Information	Publisher: Frontiers Media SA，Publishing cycle: ，Journal Type: journal，Open Access Journals: No
Basic data	Year of publication: 2012，Proportion of original research papers: 76.92%，Self Citation Rate:0.00%， Gold OA Rate: 45.83%

Advanced Optical Technologies

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Lighting with laser diodes

Light sources for high-volume manufacturing EUV lithography: technology, performance, and power scaling

Influence of ultrasonic tool oscillation during drilling of fused silica

High-radiance phosphor-converted light sources for fluorescence analysis

Rotational motion investigation in seismology – remote sensing by an optical fiber seismograph

Influence of ultrasonic tool oscillation during drilling of fused silica

High-radiance phosphor-converted light sources for fluorescence analysis

Rotational motion investigation in seismology – remote sensing by an optical fiber seismograph

Multi-task photonic reservoir computing: wavelength division multiplexing for parallel computing with a silicon microring resonator

W1-Net: a highly scalable ptychography convolutional neural network