MICROSYSTEMS & NANOENGINEERING 发表有关微纳机电系统 (MEMS/NEMS) 和与 MEMS/NEMS 相关的纳米工程最新方面的原创研究文章和评论。该杂志将涵盖微米和纳米尺度的设备和系统的新设计（理论、建模和模拟）、制造、表征、可靠性和应用。纳米工程 MEMS/NEMS 也将在本期刊的出版范围内。

The journal "Microsystems and Nanoengineering" publishes original research articles and reviews on the latest aspects of micro-electromechanical systems (MEMS/NEMS) and related nanoengineering. It covers new designs (theory, modeling, and simulation), manufacturing, characterization, reliability, and applications of devices and systems at the micro and nano scales. Research in nanoengineering related to MEMS/NEMS is also included within the scope of this journal.

《Microsystems and Nanoengineering》期刊发表关于微纳机电系统（MEMS/NEMS）及相关纳米工程领域的原创研究文章和评论。该期刊涵盖微米和纳米尺度设备和系统的新设计（包括理论、建模和模拟）、制造、表征、可靠性和应用等方面。纳米工程在MEMS/NEMS领域的研究也在本期刊的出版范围之内。

Microsystems and Nanoengineering

Noninvasive brain-computer interfaces (BCIs) show great potential in applications including sleep monitoring, fatigue alerts, neurofeedback training, etc. While noninvasive BCIs do not impose any procedural risk to users (as opposed to invasive BCIs), the acquisition of high-quality electroencephalograms (EEGs) in the long term has been challenging due to the limitations of current electrodes. Herein, we developed a semidry double-layer hydrogel electrode that not only records EEG signals at a resolution comparable to that of wet electrodes but is also able to withstand up to 12 h of continuous EEG acquisition. The electrode comprises dual hydrogel layers: a conductive layer that features high conductivity, low skin-contact impedance, and high robustness; and an adhesive layer that can bond to glass or plastic substrates to reduce motion artifacts in wearing conditions. Water retention in the hydrogel is stable, and the measured skin-contact impedance of the hydrogel electrode is comparable to that of wet electrodes (conductive paste) and drastically lower than that of dry electrodes (metal pin). Cytotoxicity and skin irritation tests show that the hydrogel electrode has excellent biocompatibility. Finally, the developed hydrogel electrode was evaluated in both N170 and P300 event-related potential (ERP) tests on human volunteers. The hydrogel electrode captured the expected ERP waveforms in both the N170 and P300 tests, showing similarities in the waveforms generated by wet electrodes. In contrast, dry electrodes fail to detect the triggered potential due to low signal quality. In addition, our hydrogel electrode can acquire EEG for up to 12 h and is ready for recycled use (7-day tests). Altogether, the results suggest that our semidry double-layer hydrogel electrodes are able to detect ERPs in the long term in an easy-to-use fashion, potentially opening up numerous applications in real-life scenarios for noninvasive BCI.

Hailing Xue

Dongyang Wang

Mingyan Jin

Hanbing Gao

Xuhui Wang

Long Xia

Dong’ang Li

Kai Sun

Huanan Wang

Xufeng Dong

Chi Zhang

Fengyu Cong

Jiaqi Lin

Microsystems & Nanoengineering

Microsyst Nanoeng

Hydrogel electrodes with conductive and substrate-adhesive layers for noninvasive long-term EEG acquisition

水凝胶电极：具有导电和基底粘附层用于非侵入式长期脑电图采集

Abstract The combination of flexible sensors and deep learning has attracted much attention as an efficient method for the recognition of human postures. In this paper, an in situ polymerized MXene/polypyrrole (PPy) composite is dip-coated on a polydimethylsiloxane (PDMS) sponge to fabricate an MXene/PPy@PDMS (MPP) piezoresistive sensor. The sponge sensor achieves ultrahigh sensitivity (6.8925 kPa −1 ) at 0–15 kPa, a short response/recovery time (100/110 ms), excellent stability (5000 cycles) and wash resistance. The synergistic effect of PPy and MXene improves the performance of the composite materials and facilitates the transfer of electrons, making the MPP sponge at least five times more sensitive than sponges based on each of the individual single materials. The large-area conductive network allows the MPP sensor to maintain excellent electrical performance over a large-scale pressure range. The MPP sensor can detect a variety of human body activity signals, such as radial artery pulse and different joint movements. The detection and analysis of human motion data, which is assisted by convolutional neural network (CNN) deep learning algorithms, enable the recognition and judgment of 16 types of human postures. The MXene/PPy flexible pressure sensor based on a PDMS sponge has broad application prospects in human motion detection, intelligent sensing and wearable devices.

Hui Xia

Lin Wang

Hao Zhang

Zihu Wang

Liang Zhu

Haolin Cai

Yanhua Ma

Zhe Yang

Dongzhi Zhang

MXene/PPy@PDMS sponge-based flexible pressure sensor for human posture recognition with the assistance of a convolutional neural network in deep learning

基于MXene/PPy@PDMS海绵的柔性压力传感器用于人体姿态识别，借助深度学习中的卷积神经网络

Exhaled breath analysis has attracted considerable attention as a noninvasive and portable health diagnosis method due to numerous advantages, such as convenience, safety, simplicity, and avoidance of discomfort. Based on many studies, exhaled breath analysis is a promising medical detection technology capable of diagnosing different diseases by analyzing the concentration, type and other characteristics of specific gases. In the existing gas analysis technology, the electronic nose (eNose) analysis method has great advantages of high sensitivity, rapid response, real-time monitoring, ease of use and portability. Herein, this review is intended to provide an overview of the application of human exhaled breath components in disease diagnosis, existing breath testing technologies and the development and research status of electronic nose technology. In the electronic nose technology section, the three aspects of sensors, algorithms and existing systems are summarized in detail. Moreover, the related challenges and limitations involved in the abovementioned technologies are also discussed. Finally, the conclusion and perspective of eNose technology are presented.

Ying Li

Xiangyang Wei

Yumeng Zhou

Jing Wang

Rui You

Microsystems &amp; Nanoengineering

Research progress of electronic nose technology in exhaled breath disease analysis

呼气疾病分析中电子鼻技术的研究进展

Thin-film PMUTs have been important research topics among microultrasound experts, and a concise review on their research progress is reported herein. Through rigorous surveying, scrutinization, and perception, it has been determined that the work in this field began nearly 44 years ago with the primitive development of functional piezoelectric thin-film materials. To date, there are three major companies commercializing thin-film PMUTs on a bulk scale. This commercialization illustrates the extensive contributions made by more than 70 different centers, research institutes, and agencies across 4 different continents regarding the vast development of these devices’ design, manufacturing, and function. This review covers these important contributions in a short yet comprehensive manner; in particular, this paper educates readers about the global PMUT outlook, their governing design principles, their manufacturing methods, nonconventional yet useful PMUT designs, and category-wise applications. Crucial comparison charts of thin-film piezoelectric material used in PMUTs, and their categorically targeted applications are depicted and discussed to enlighten any MEMS designer who plans to work with PMUTs. Moreover, each relevant section features clear future predictions based on the author’s past knowledge and expertise in this field of research and on the findings of a careful literature survey. In short, this review is a one-stop time-efficient guide for anyone interested in learning about these small devices.

Kaustav Roy

Joshua En-Yuan Lee

Chengkuo Lee

Thin-film PMUTs: a review of over 40 years of research

薄膜压电微机械超声换能器：40余年研究综述

Abstract With the rapid development of various fields, including aerospace, industrial measurement and control, and medical monitoring, the need to quantify flow velocity measurements is increasing. It is difficult for traditional flow velocity sensors to fulfill accuracy requirements for velocity measurements due to their small ranges, susceptibility to environmental impacts, and instability. Herein, to optimize sensor performance, a flexible microelectromechanical system (MEMS) thermal flow sensor is proposed that combines the working principles of thermal loss and thermal temperature difference and utilizes a flexible cavity substrate made of a low-thermal-conductivity polyimide/SiO 2 (PI/SiO 2 ) composite porous film to broaden the measurement range and improve the sensitivity. The measurement results show that the maximum measurable flow velocity can reach 30 m/s with a resolution of 5.4 mm/s. The average sensitivities of the sensor are 59.49 mV/(m s −1 ) in the medium-to-low wind velocity range of 0–2 m/s and 467.31 mV/(m s −1 ) in the wind velocity range of 2–30 m/s. The sensor proposed in this work can enable new applications of flexible flow sensors and wearable devices.

Min Li

Guangzhao Qin

Chen Jia

Danyu Zhang

Zhikang Li

Xiangguang Han

Shusheng Xu

Libo Zhao

Guoxi Luo

Cunlang Liu

Ping Yang

Qijing Lin

Fabrication and characterization of high-sensitivity, wide-range, and flexible MEMS thermal flow velocity sensors

高灵敏度、宽量程、柔性MEMS热式流速传感器的制备与表征

Abstract Chronic wounds, which require prolonged healing periods, pose significant impacts on individuals with diabetes, vascular diseases, and high blood pressure. Simultaneous drainage and monitoring of wound exudate are vital for advanced wound management. However, recently reported smart dressings either lack integration of wound cleaning and monitoring functions or fail to achieve dynamic in situ monitoring of wound status, which hinders their ability to meet the demands of wound care. In this study, a smart bandage is introduced, which integrates a biocompatible liquid diode membrane with an ultrasensitive 3D polyaniline mesh (M-PANI)-based pH biosensor. The smart bandage allows for unidirectional drainage of wound exudate while dynamically sensing the wound pH environment. Specifically, the proposed smart bandage effectively cleans excessive wound exudate while providing real-time information on the wound status during the drainage process. The M-PANI-based pH biosensor demonstrates a high sensitivity of 61.5 mV/pH and a wide pH detection range from 4.0 to 10.0, encompassing the pH range of normal and infected wounds. Moreover, the sensing module exhibits excellent stability after 48 hours of dynamic testing and 28 days of storage, with only a 4.8% decline in the detected signal, and high repeatability with a device-to-device relative standard deviation (RSD) of 3.1%. To evaluate the practicality of this smart bandage, simulated skin and rats have been employed, and the results indicate the immense potential of this smart bandage for clinical applications. In conclusion, the present smart bandage demonstrates considerable promise for wound exudate cleaning and monitoring in advanced wound care and offers a promising method for home-based wound management.

Xueqi Wang

Jing Cheng

Han Wang

Chronic wound management: a liquid diode-based smart bandage with ultrasensitive pH sensing ability

慢性伤口管理：基于液体二极管的超灵敏pH传感智能绷带

Abstract Microfluidic impedance flow cytometry has been widely used in leukocyte differential and counting, but it faces a bottleneck due to the trade-off between impedance detection throughput and sensitivity. In this study, a microfluidic impedance flow cytometer based on a virtual constriction microchannel was reported, in which the virtual constriction microchannel was constructed by crossflow of conductive sample and insulated sheath fluids with underneath micro-electrodes for impedance measurements. Compared to conventional mechanical constriction microchannels, this virtual counterpart could effectively avoid direct physical contact between cells and the microchannel walls to maintain high throughputs, and significantly reduce the volume of the impedance detection region for sensitivity improvements. Using the developed microfluidic impedance flow cytometer, impedance pulses of three leukemia cell lines, K562, Jurkat, and HL-60, were detected, achieving a 99.8% differentiation accuracy through the use of a recurrent neural network. Furthermore, impedance pulses of four white blood cell subpopulations (neutrophils, eosinophils, monocytes, and lymphocytes) from three donors were detected, achieving a classification accuracy of ≥99.2%. A classification network model was established based on purified white blood cell and applied to impedance pulses of two white blood cell mixtures, resulting in proportional distributions of four leukocyte subpopulations within theoretical ranges. These results indicated that the developed microfluidic impedance flow cytometer based on the virtual constriction microchannel could achieve both high detection throughput and high sensitivity, showing great potentials for clinical diagnostics and blood analysis.

Minruihong Wang

Jie Zhang

Xiao Chen

Yimin Li

Xukun Huang

Junbo Wang

Yueying Li

Xiaoye Huo

Jian Chen

Microfluidic impedance flow cytometer leveraging virtual constriction microchannel and its application in leukocyte differential

微流控阻抗流式细胞仪利用虚拟收缩微通道及其在白细胞分类中的应用

Abstract Hydrocephalus is characterized by the accumulation of excess cerebrospinal fluid (CSF) in the cranium due to an imbalance between production and absorption of CSF. The standard treatment involves the implantation of a shunt to divert excess CSF into the peritoneal cavity, but these shunts exhibit high failure rates over time. In pursuit of improved reliability and performance, this study proposes a miniaturized valve designed to mimic the natural one-way valve function of the arachnoid granulations and thereby replace the shunts. A benchtop testing setup was employed to characterize the behavior of the fabricated valve. Additionally, an animal study was conducted to assess the valve’s in vivo performance. This involved the injection of saline into the lateral ventricle to elevate intracranial pressure (ICP), followed by the drainage of the saline through the valve inserted into the cisterna magna (CM) to reduce pressure. Our prototype features a silicone duckbill valve design combined with a silicone tube as an inlet. Through benchtop testing, the valve exhibited unidirectional flow with negligible reverse leakage, revealing that critical parameters such as the width of the fluid channel (W) and bill length (L) could be controlled to optimize valve performance. Notably, the valve configuration with W= 0.8mm and L &lt; 0.5mm achieved the lowest cracking pressure (2.22 ± 0.07 mmHg) and outflow resistance (22.00 ± 0.70 mmHg/mL/min) within the low cracking pressure range of conventional shunts. Our observations of the in vivo test demonstrated that when untreated states, pressure differences from baseline to peak exceeded 20 mmHg due to the absence of drainage, resulting in sustained pressure elevation. Conversely, upon treating states by removing the clamp, pressure differences from baseline to peak remained below 5 mmHg, indicating effective drainage of injected saline through the valve. These promising results highlight the potential of the miniaturized duckbill valve as an alternative for ICP management in hydrocephalus, offering improved control and reliability compared to conventional shunting systems. Further research is required to evaluate the valve’s performance as a chronic implant.

Yuna Jung

Daniel Gulick

Jennifer Blain Christen

Fabrication and in vivo testing of a sub-mm duckbill valve for hydrocephalus treatment

用于脑积水治疗的亚毫米鸭嘴阀的制备与体内测试

Abstract Cr-doped V 2 O 3 thin film shows a huge resistivity change with controlled epitaxial strain at room temperature as a result of a gradual Mott metal-insulator phase transition with strain. This novel piezoresistive transduction principle makes Cr-doped V 2 O 3 thin film an appealing piezoresistive material. To investigate the piezoresistivity of Cr-doped V 2 O 3 thin film for implementation in MEMS sensor applications, the resistance change of differently orientated Cr-doped V 2 O 3 thin film piezoresistors with external strain change was measured. With a longitudinal gauge factor of 222 and a transversal gauge factor of 217 at room temperature, isotropic piezoresistivity coefficients were discovered. This results in a significant orientation-independent resistance change with stress for Cr-doped V 2 O 3 thin film piezoresistors, potentially useful for new sensor applications. To demonstrate the integration of this new piezoresistive material in sensor applications, a micromachined pressure sensor with Cr-doped V 2 O 3 thin film piezoresistors was designed, fabricated and characterized. At 20 °C, a sensitivity, offset, temperature coefficient of sensitivity and temperature coefficient of offset of 21.81 mV/V/bar, -25.73 mV/V, -0.076 mV/V/bar/°C and 0.182 mV/V/°C, respectively, were measured. This work paves the way for further research on this promising piezoresistive transduction principle for use in MEMS sensor applications.

Michiel Gidts

Wei-Fan Hsu

Maria Recaman Payo

Shaswat Kushwaha

Frederik Ceyssens

Dominiek Reynaerts

Jean-Pierre Locquet

Michael Kraft

Chen Wang

Study on the piezoresistivity of Cr-doped V2O3 thin film for MEMS sensor applications

掺铬V2O3薄膜压阻性能研究及其在MEMS传感器中的应用

Abstract Conformal electronic devices on freeform surface play a critical role in the emerging smart robotics, smart skins, and integrated sensing systems. However, their functional structures such as circuits tend to tear-off, break, or crack under mechanical or thermal influence when in service, thus limiting the application reliability of conformal electronics. Herein, inspired by the tree root system, template-confined additive (TCA) printing technology was presented for reliable fabrication of robust circuits. TCA printing technology involves the penetration of adhesive into the functional material, thereby enhancing the mechanical robustness of the circuits, allowing them to maintain their electrical performance despite the presence of external damaging factors such as scratching, abrasion, folding, and high temperatures. For example, herein, the circuits could withstand mechanical abrasion at temperatures as high as 350 °C without compromising electrical properties. Benefiting from the confines of template, the printed circuits achieved resolutions of up to 300 nm, suitable for various materials such as P(VDF-TrFE), MWCNTs, and AgNPs, which enabled the multi-material self-aligned fabrication. Furthermore, the versatility of TCA printing was presented by fabricating circuits on arbitrary substrates, and realizing various devices, such as conformal temperature/humidity sensing system and epidermal ultra-thin energy storage system. These applications present the significant potential of TCA printing in fabricating intelligent devices.

Guifang Liu

Xiangming Li

Yangfan Qiu

Chuanhang Zeng

Xinkai Zhu

Chao Wang

Xiaoliang Chen

Chunhui Wang

Hongmiao Tian

Jinyou Shao

Root-inspired, template-confined additive printing for fabricating high-robust conformal electronics

根系启发、模板限域的增材打印用于制造高鲁棒性共形电子器件

Abbreviation	Microsyst Nanoeng
Journal Impact	7.14
Quartiles(Global)	NANOSCIENCE & NANOTECHNOLOGY(Q1)

ISSN	2055-7434, 2096-1030
h-index	59

Publication Information	Publisher: Nature Publishing Group，Publishing cycle: ，Journal Type: journal，Open Access Journals: Yes
Basic data	Year of publication: 2015，Proportion of original research papers: 92.48%，Self Citation Rate:4.10%， Gold OA Rate: 100.00%
Journal Fees	$4290Details
Average review cycle	网友分享经验：20 Weeks

Microsystems and Nanoengineering

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